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200 PCUversusSEN NV GSD III 180 High Current Ion

Axcelis 200 PCU, Sumitomo SEN NV GSD III 180 High Current Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCUAxcelis
SEN NV GSD III 180 High Current IonSumitomo
OEMAxcelisSumitomo
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2000 Vintage—
Control system——
Generation——
FamilyAxcelis NV GSD 200Sumitomo SEN
Cited variants
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
—
Specifications
P/NSC 4840 A[3]—
Frequency50 Hz[3]50 Hz[4]
Phase3 Phase[3]3 Phase[4]
Voltage400 V[3]—
Configuration—200 Volt[4]
Power—50 kVA[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing
  4. [4]inventory listing