Comparison ledger
Axcelis 6200 A, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6200 AAxcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 6200 A | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Configuration | Auto recipe load[1] | Platen ADV-S Type[4] |
| Equipment type | Ion implanter[1] | — |
| Wafer size | 6 inch[1] | — |
| Automatic recipe load | Supported[1] | — |
| Category | Ion Implantation[2] | Ion Implantation[5] |
| Equipment type (NV 6200 A Ion) | Ion implanter made by Axcelis[3] | — |
| Type | — | ESC Platen ADV-S Type[4] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →