Comparison ledger
Axcelis Fusion M 200 PC UV, Blue M 0 V 500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Fusion M 200 PC UVAxcelis | 0 V 500Blue M |
|---|---|---|
| OEM | Axcelis | Blue M |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis Fusion M 200 PC UV | Blue M 0 V 500 |
| Specifications | ||
| P/N | SC 4801 A[1] | — |
| Configuration | HDD & Software included[1] | — |
| Voltage | 208 V[1] | — |
| Frequency | 60 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Wafer Sizes | 6, 8 inch[1] | — |
| Part Number | SC 4801 A[1] | — |
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