Comparison ledger
Axcelis Fusion M 200 PC UV, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Fusion M 200 PC UVAxcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis Fusion M 200 PC UV | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| P/N | SC 4801 A[1] | — |
| Configuration | HDD & Software included[1] | — |
| Voltage | 208 V[1] | — |
| Frequency | 60 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Wafer Sizes | 6, 8 inch[1] | — |
| Part Number | SC 4801 A[1] | — |
| Asset Number | — | 142841[2] |
| Last Confirm Date | — | October 14, 2025[3] |
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