Comparison ledger
Axcelis NV 8250 Ion, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 8250 IonAxcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 8250 | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Configuration | Mid Current[1] | Platen ADV-S Type[2] |
| Voltage | 208 VAC[1] | — |
| Input Current | 55 Amps[1] | — |
| Phase | 3 Phase[1] | — |
| Full Load Current | 88 Amps[1] | — |
| Max Load Current | 100 Amps[1] | — |
| Interrupt Capacit | 85 kA rms[1] | — |
| Wafer Size | 8 inch[1] | — |
| Type | Mid Current[1] | ESC Platen ADV-S Type[2] |
| Frequency | 50/60 Hz[1] | — |
| Wires | 5 Wires[1] | — |
| Interrupt Capacity | 85 kA rms[1] | — |
| Vintage | 1998[1] | — |
| Category | — | Ion Implantation[3] |
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