Comparison ledger
Axcelis NV GSD 200 E 2 Ion, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV GSD 200 E 2 IonAxcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Cryo-Pumps | CTI/Edwards Onboard; OB-8 + OB-10 fully refurbished[1] | — |
| Cryo-Kompressor | CTI 9650 Low-Voltage[1] | — |
| Turbo-Pumps | Seiko STP A 2203 fully refurbished[1] | — |
| Terminal-Rough-Pump | without (Edwards IGX Config)[1] | — |
| End station Rough-Pump | without (Edwards IGX Config) bottom remote external[1] | — |
| Gas box | 5-String, 4x 2L Low-Pressure[1] | — |
| String 1 | Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3[1] | — |
| String 2 | BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[1] | — |
| String 3 | Ash3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[1] | — |
| String 4 | Ph3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[1] | — |
| String 5 | Argon Carriergas; MFC Brooks GF120 10sccm-N2[1] | — |
| Disk-Drive | Direct-Drive[1] | — |
| Dose-Type | Regular[1] | — |
| Source-Type | ELS4 IHC-Source without Vaporizer[1] | — |
| High voltage-Transformer | Oil[1] | — |
| Light-Tower | red/yellow/green; no buzzer[1] | — |
| Main-Workstation | SUN Solaris AXI 3HE (special case)[1] | — |
| Software-Version | 6.13.5.1 (no license included)[1] | — |
| Network | 24 port 100MB Ethernet with Cisco Router-Kit[1] | — |
| Cell-Controller | V6 Type[1] | — |
| Energy Config | 0 - 160Kv High current[2] | — |
| CE-Conformity | Yes[2] | — |
| Voltage | 208V[2] | — |
| Configuration | — | Platen ADV-S Type[3] |
| Type | — | ESC Platen ADV-S Type[3] |
| Category | — | Ion Implantation[4] |
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