Waferpedia

Comparison ledger

18 D SurfaceversusDFL 7560 L

Blanchard 18 D Surface, Disco DFL 7560 L, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
18 D SurfaceBlanchard
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—Robot Wafer handling
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 18 D SurfaceDisco DFL
Cited variants—
  • 200mm Fully Automatic wafer handling from/to standard wafer cassette[1]
Specifications
Voltage416 V[2]—
Phase3 Phase[2]—
Cycles50[2]—
Control Voltage110[2]—
MakeBlanchard[2]—
Model18 D[2]—
Asset #153970[2]—
Power416 V, 3 phase[2]—
Wafer size—Robot Wafer handling[1]
Wafer—Can be modified at later date to 3”, 4” & 6” wafers and frame[1]
Configuration—Operation by touch panel LCD monitor[1]
Uninterruptible Power Supply—1[1]
Wafer Sizes (standard)—2, 3, 4 inch[1]
Wafer Size Modification—Can be modified to 3”, 4” & 6” wafers and frame[1]
Maximum Workpiece Size—ø150 mm[4]
Processing Mode—Fully automatic[4]
Dimensions (W x D x H)—2,000 x 1,810 x 1,800 mm[4]
Weight—approx. 3,300 kg[4]
Robot Wafer Handling—Yes[1]
Operation Interface—Touch panel LCD monitor[1]
Power Supply—Step-down Transformer 400 V, 3 phases, 50 Hz[1]
CE Marking—Yes[1]
Microscope—Low and High Magnification microscope with LED illumination[1]
Axis Control—X and Y axis with linear scale closed loop control[1]
Laser Cooling—Laser power supply with built in water cooled chillers[1]
Additional Chiller—Chiller unit to supply cooling water for Laser power supply[1]
X Axis Chiller—Chiller unit to supply cooling water to X axis[1]
Z Axis Positional Repeatability—0.002 mm[1]
Optional Upgrade—200 mm Fully Automatic wafer handling from/to standard wafer cassette, Chuck for 200mm wafers, New robot design for handling heavier wafers, 6 inch Lens and new Galvo Scanner[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]web.archive.orgweb.archive.org