Waferpedia

Comparison ledger

0 500versusThermco 5000 Diffusion

Blue M 0 500, SVG Thermco 5000 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MSVG
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500SVG Thermco 5000 Diffusion
Cited variants—
  • Thermco 5100[1]
  • Thermco 5200[1]
Specifications
ManufacturerBlue M[2]—
Model0 500[2]5000[3]
Asset number139866[2]—
Last confirm dateSeptember 10, 2025[2]—
Equipment typeOven[2]Diffusion furnace[3]
OEM—SVG Thermco[3]
Wafer size—6 inch[3]
Series—Thermco 5000 series[1]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]thermcosystems.comthermcosystems.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing