Waferpedia

Comparison ledger

0 V 500versus1500 SX

Blue M 0 V 500, Heller 1500 SX, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
1500 SXHeller
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Heller 1500 SX
Specifications
Make—Heller[1]
Model—1500 SX[1]
Asset type—Oven[1]
Vintage—1999[1]
Category—Thermal / Diffusion[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com