Waferpedia

Comparison ledger

0 V 500versusKokusai DD 853 V Vertical Diffusion

Blue M 0 V 500, Hitachi Kokusai DD 853 V Vertical Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMBlue MHitachi
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Hitachi Kokusai
Specifications
Configuration—For oxidation, diffusion, and annealing[1]
Water Exposure—water marks inside and outside the unit[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing