Waferpedia

Comparison ledger

300 X SpinversusGasonics Aura 3010

Brewer Science 300 X Spin, Lam Research Gasonics Aura 3010, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
300 X SpinBrewer Science
Gasonics Aura 3010Lam Research
OEMBrewer ScienceLam Research
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science 300 X SpinLam Research Gasonics Aura
Specifications
P/N901445[1]—
ConfigurationHeavy Duty Drive[1]Parts machine[2]
Drive TypeHeavy Duty Drive[1]—
Voltage208-240 V[1]—
Part Number901445[1]—
Equipment type—Asher[4]
Wafer size—6 inch[4]
Condition—Parts machine[2]
Make—Lam / Novellus / Gasonics[2]
Model—Aura 3010[2]
Type—Asher[2]
Wafer Sizes—6 inch[4]
Product description—Parts machine[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing