Waferpedia

Comparison ledger

300 X SpinversusLithius G 260616

Brewer Science 300 X Spin, Tokyo Electron Lithius G 260616, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
300 X SpinBrewer Science
Lithius G 260616Tokyo Electron
OEMBrewer ScienceTokyo Electron
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science 300 X SpinTokyo Electron Lithius G 260616
Specifications
P/N901445[1]—
ConfigurationHeavy Duty Drive[1]—
Drive TypeHeavy Duty Drive[1]—
Voltage208-240 V[1]—
Part Number901445[1]—
Manufacturer—Tokyo Electron[2]
Wafer Size—12 inch[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing