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017-0024-01 PrealignerversusFPA 3000 i 4 Fine Pattern

Brooks 017-0024-01 Prealigner, Canon FPA 3000 i 4 Fine Pattern, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
FPA 3000 i 4 Fine PatternCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerCanon FPA 3000
Specifications
Software Version—V4.09A.08[1]
Software version—V4.08a.10[2]
Type—Fine Pattern Aligner[1]
017-0024-01 Prealigner entryFPA 3000 i 4 Fine Pattern entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing