Waferpedia

Comparison ledger

017-0024-01 PrealignerversusNSR 2205 iL 1 i-Line

Brooks 017-0024-01 Prealigner, Nikon NSR 2205 iL 1 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerNikon NSR 2205 iL 1 i-Line
Specifications
Light source—i-line[1]
Vintage—2023[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing