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017-0146-01 PrealignerversusPRE 300 300 B 301 301 B Wafer Pre-Aligner

Brooks 017-0146-01 Prealigner, Brooks PRE 300 300 B 301 301 B Wafer Pre-Aligner, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
PRE 300 300 B 301 301 B Wafer Pre-AlignerBrooks
OEMBrooksBrooks
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerBrooks PRE 300 300 B 301 301 B Wafer Pre-Aligner
Specifications
Wafer Size—12 inch[1]
Category—Lithography[2]
017-0146-01 Prealigner entryPRE 300 300 B 301 301 B Wafer Pre-Aligner entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com