Comparison ledger
Brooks 017-0146-01 Prealigner, Canon FPA 3030 i 5+ Fine Pattern, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Canon FPA |
| Specifications | ||
| Configuration | — | 350 nm[1] |
| Make | — | Canon[1] |
| Model | — | FPA 3030 i 5+[1] |
| Type | — | Stepper[2] |
| Technology | — | i-line (365nm)[2] |
| Wafer Size | — | 200mm; 150mm[2] |
| Resolution | — | ≤0.35μm[2] |
| Numerical Aperture (NA) | — | 0.45 ~ 0.63[2] |
| Reticle Size | — | 6in. (0.25in. thick); optional 5in.[2] |
| Reduction Ratio | — | 5:1[2] |
| Field Size | — | 22mm x 22mm[2] |
| Overlay Accuracy | — | ≤40nm (|m|+3 )[2] |
| Throughput | — | ≥104wph (200mm); ≥120wph (150mm)[2] |
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