Waferpedia

Comparison ledger

017-0146-01 PrealignerversusMA8

Brooks 017-0146-01 Prealigner, Karl Suss MA8, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MA8Karl Suss
OEMBrooksKarl Suss
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerKarl Suss MA8
Specifications
OEM—Karl Suss[1]
Model—MA8[1]
Equipment type—Mask Aligner[1]
Lithography context—Photolithography / lithography equipment[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edu