Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR-1505G4, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR-1505G4Nikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | 4" |
| Process node | — | better than 750 nm resolution; better than 150 nm alignment |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | g-line |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR-1505G4 |
| Specifications | ||
| Type | — | Wafer stepper[1] |
| Reduction | — | 5x reduction[1] |
| Reticle size | — | 5" reticle[1] |
| Wafer size | — | 4" wafers[1] |
| Exposure source | — | g-line UV[1] |
| Resolution | — | better than 750 nm[1] |
| Alignment | — | better than 150 nm[1] |
| Reduction factor | — | 5x[1] |
| Alignment accuracy | — | better than 150 nm[1] |
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