Comparison ledger
Brooks 017-0146-01 Prealigner, OAI 6000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 6000OAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI 6000 |
| Specifications | ||
| Product name | — | Model C&D P9000 / OAI 6000: Integrated Lithography Cell[1] |
| System type | — | Integrated lithography cell[1] |
| Process steps | — | Coat | Bake | Align/Expose | Develop[1] |
| Manufacture | — | Fully manufactured in the USA[1] |
| Configuration | — | Cluster configuration[1] |
| Wafer flow | — | Allows for dynamic wafer flow and parallel application processing[1] |
| Control interface | — | Single terminal for control over recipe and program selection; P9000 performs as the master user interface[1] |
| Operator requirement | — | Fewer operators needed in the lithography module[1] |
| Wafer handling | — | Reduced wafer handling[1] |
| Footprint | — | Small footprint[1] |
| Wafer size capability | — | Multiple wafer sizes can be processed simultaneously[1] |
| Product class | — | Automated Front & Backside Mask Aligner[2] |
| Application area | — | For production semiconductors, MEMS, sensors, advanced packaging, IOT, microfluidics[2] |
| Type | — | Automated Front & Backside Mask Aligner System / Integrated Lithography Cell[2] |
| Capabilities | — | Coat, Bake, Align/Expose, Develop[1] |
| Country of Manufacture | — | USA[1] |
| Wafer Size Support | — | Multiple wafer sizes can be processed simultaneously[1] |
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