Comparison ledger
Brooks VAC 407 2 A, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VAC 407 2 ABrooks | |
|---|---|---|
| OEM | Brooks | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks VAC 407 2 A | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Wafer Sizes | 612 inch[1] | — |
| Configuration | — | Platen ADV-S Type[2] |
| Type | — | ESC Platen ADV-S Type[2] |
| Category | — | Ion Implantation[3] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →