Waferpedia

Comparison ledger

Ecomet VIversus15 Lapper

Buehler Ecomet VI, Lapmaster 15 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Ecomet VIBuehler
15 LapperLapmaster
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Ecomet VILapmaster 15
Specifications
Number Of Conditioning Rings—Up to 3[1]
Ring ID—Up to 5.5″[1]
Plate Diameter – Outside—15″[1]
Plate Diameter – Inside—3 1/2″[1]
Standard RPM—60[1]
Drive Motor—1/2 HP[1]
Electrics—110V / 1Ph / 60Hz[1]
Dimensions – Approximate—26″(L-R) x 21″(F-B) x 22″(H)[1]
Configuration—Equipped with:[1]
Equipped with: 15″ Cast Iron Plate—Included[1]
Equipped with: (3) Yoke/Roller Bearing Assemblies—Included[1]
Equipped with: (3) Conditioning Rings—Included[1]
Equipped with: (3) Hold Downs—Included[1]
Equipped with: 30 Minute Timer—Included[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing