Waferpedia

Comparison ledger

MetaServ 3000 Vector LCversus120 Continuous

Buehler MetaServ 3000 Vector LC, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler MetaServ 3000 Vector LCLapmaster 120 Continuous
Specifications
Configuration50 to 500 rpm[1]—
Voltage120 V[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing