Comparison ledger
Canon FPA 2500 i 3 i-Line, Nikon NSR 2205 i 12 D i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 2500 i 3 i-LineCanon | |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | Can produce wafer as-is |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1996 Vintage · 1999 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 2500 | Nikon NSR 2205 |
| Specifications | ||
| Reticle Size | 5"[2] | — |
| Wafer Type | Notch[2] | — |
| Auto Feed | Left Hand[2] | — |
| Chuck Type | Ring[2] | — |
| Optional Parts | Canon Reticle Charger[2] | — |
| Track Interface / Type | Yes[2] | — |
| Configuration | Software version; VS 5.26 BW[2] | Vax Station, Pin Chuck[5] |
| Date | 6/19/2023[2] | — |
| IUC Uniformity NA/Sigma mode (54/60) | 517[2] | — |
| IUC Distribution NA/Sigma mode (54/60) | 1.5[2] | — |
| IUC Uniformity NA/Sigma mode (50/70) | N/A[2] | — |
| IUC Distribution NA/Sigma mode (50/70) | N/A[2] | — |
| Reticle Barcode | Canon[3] | — |
| Track interface / Type | Yes / Tel[3] | — |
| Software Version | VS 5.26 BW[3] | MCSV 2.41, OCSV 2.41[5] |
| Wafer Size | 8 inch[2] | — |
| Track Interface | Yes / Tel[3] | — |
| Optional Part | Canon Reticle Charger[2] | — |
| CIM | — | SECS[5] |
| Process | — | Photolithography[5] |
| Factory Interface | — | Open Cassette (2)[5] |
| Handler Sytem | — | WL Type 3[5] |
| Power | — | 674mW/cm2 (at most recent lamp change in May 2025)[5] |
| Uniformity | — | 0.93% (at most recent lamp change in May 2025)[5] |
| TFD | — | 0.332um (July 2025)[5] |
| Astigmatism | — | 0.259um (July 2025)[5] |
| Tool type | — | i-Line Stepper[1] |
| Wafer size | — | 6 inch[1] |
| Controller/chuck | — | Vax Station, Pin Chuck[5] |
| Handler system | — | WL Type 3[5] |
| Category | — | i-line Stepper[5] |
| Wafer Sizes | — | 6 inch, 8 inch[1] |
| Vintage | — | 1996, 1999[5] |
| OEM | — | Nikon[1] |
| Model | — | NSR 2205 i 12 D[1] |
| Equipment type | — | i-Line Stepper[1] |
| Vax station | — | Pin Chuck[5] |
| Voltage | — | 208 V[7] |
| Phase | — | 3 Phase[7] |
| Handler options | — | SIC Substrate[7] |
| System SW (OS) Version | — | Nikon Nest[7] |
| Robot Type | — | OEM[7] |
| End Effecter Type | — | OEM[7] |
| Supporting Equipment | — | STD OEM items[7] |
| CDA | — | N2[7] |
| DIW | — | Chilled Water[7] |
| Type | — | i-Line stepper[1] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →