Comparison ledger
Canon FPA 3000 EX 4, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 3000 EX 4Canon | 1000 FamilyUltratech |
|---|---|---|
| OEM | Canon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Main body only[1] | — |
| OEM | Canon[1] | — |
| Model | FPA 3000 EX 4[1] | — |
| Equipment type | Stepper[1] | — |
| Wafer size | 8 inch[3] | — |
| Exposure source | KrF[3] | — |
| Resolution | 250nm[3] | — |
| Type | Stepper[3] | — |
| Light source | KrF excimer laser[3] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[4] |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
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