Comparison ledger
Canon FPA 6000 ES 6 a KrF, Nikon 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 6000 ES 6 a KrFCanon | 1505 G 6 ENikon |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1988– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 6000 | Nikon 1505 |
| Specifications | ||
| Configuration | 90nm[1] | 5" reticle[3] |
| Manufacturer | Canon[1] | — |
| Model | FPA 6000 ES 6 a[1] | 1505 G 6 E[3] |
| Type | KrF Scanner[1] | — |
| Resolution / Node | 90nm[2] | — |
| Wafer Size | 12 inch (300mm)[2] | 4 inch[3] |
| Laser Source | Cymer ELS-7310[2] | — |
| Reticle Size | 6 inch[2] | — |
| Reticle Configuration | Inline (R->L)[2] | — |
| Uniformity | 1.811%[2] | — |
| Intensity | 24299.68 W/m²[2] | — |
| Make | Canon[1] | Nikon[3] |
| Equipment type | KrF Scanner[1] | — |
| Process node | 90nm[2] | — |
| Wafer size | 12 inch[2] | — |
| Reticle | 6 inch reticle inline (R->L)[2] | — |
| Laser source | Cymer Laser (ELS-7310)[2] | — |
| Resolution | — | 650 nm[4] |
| Numerical Aperture | — | 0.54[4] |
| Reduction | — | 5x[4] |
| Exposure Field | — | 15 x 15 mm[4] |
| Alignment Accuracy | — | 130 nm[4] |
| Light Source | — | g-line[5] |
| Introduction Year | — | 1988[4] |
| NA (Numerical Aperture) | — | 0.54[4] |
| Category | — | Stepper[3] |
| Wafer Sizes | — | 4 inch[3] |
| Exposure type | — | g-line[4] |
| NA | — | 0.54[4] |
| Exposure field | — | 9.3 x 18.8 mm[4] |
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