Comparison ledger
CEE 1000 Hot Plate, Tokyo Electron Alpha 8 SE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 8 SETokyo Electron | |
|---|---|---|
| OEM | CEE | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | Wafer I Cassette Handling |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2003– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Tokyo Electron Alpha |
| Specifications | ||
| Configuration | 4"[1] | 50/60 HZ[2] |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | 8 inch[3] |
| Process | — | High Temp Oxide (HCL, Ar)[2] |
| Power | — | 4.0 kVA[2] |
| Maximum Full Load Current | — | 40 A[2] |
| Power AC | — | 100 V[2] |
| Overcurrent / Shortcircuit | — | 40 A[2] |
| Voltage | — | 208 V[8] |
| Phase | — | 3 Phase[8] |
| Software Version | — | 3.01 Rev. 003[8] |
| Handler System | — | Wafer Transfer Robot[8] |
| Main System | — | Well Drive[8] |
| Factory Interface | — | SMIF[8] |
| System Layout | — | Main, Utility |
| System Type | — | L Type |
| Side Maintenance | — | Installed |
| System Paint Color | — | Ivory |
| Furnace Front Surface Finish | — | Ivory |
| Heater Model | — | VMU-40-007EX(1200°C) |
| Rapid Cooling Unit | — | Not Installed |
| N2 Load Lock | — | Not Installed |
| O2 Analyzer | — | Not Installed |
| SMIF Maker/Model | — | Not Installed |
| AGV Compatibility | — | Unable |
| System Main Controller | — | WAVES |
| Mechanical Controller | — | WAVES |
| Sequenc Controller | — | WAVES |
| Gas Controller | — | WAVES |
| Gas Flow Chart Panel | — | Installed (Front, Rear) |
| Operation Panel | — | Installed (Front, Rear) |
| Signal Tower / Colors | — | Installed (3 COLORS) |
| Furnace Temperature Controller | — | Model 560A |
| Furnace Overtemp Detector | — | FENWAL/DMR-5FR |
| Vintage | — | 2006 |
| Wafer size | — | Wafer I Cassette Handling |
| Frequency | — | 50/60 HZ[2] |
| Power Consumption | — | 4.0 kVA[2] |
| Furnaces / Diffusion Vintage | — | 2006 |
| System Controller | — | TS-4000Z |
| Temperature Range | — | 960°C (max. 1025°C) |
| Front Surface Finish | — | White |
| Process Pressure | — | Atmospheric |
| Inner TC Type | — | In-line |
| Tube Seal | — | Lip Seal |
| Wafer Type | — | Notch |
| Stocker | — | 21 slot Carrier |
| Model | — | Alpha 8 SE[2] |
| Make | — | Tel[2] |
| Equipment type | — | Furnace[3] |
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