Comparison ledger
CEE 1000 Hot Plate, Tokyo Electron Alpha 8 SE D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 8 SE DTokyo Electron | |
|---|---|---|
| OEM | CEE | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Tokyo Electron Alpha |
| Specifications | ||
| Configuration | 4"[1] | High Temp Oxide[2] |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | — |
| System Type | — | L Type[2] |
| Heater Model | — | VMU-40-007EX (1200 Deg C)[2] |
| Cassette I/O Type | — | Normal I/O Type[2] |
| AGV Compatibility | — | Unable[2] |
| System Main Controller | — | Waves[2] |
| Mechanical Controller | — | Waves[2] |
| Sequence Controller | — | Waves[2] |
| Gas Controller | — | Waves[2] |
| Gas Flow Chart Panel | — | Installed (Front, Rear)[2] |
| Optional Panel | — | Installed (Front, Rear)[2] |
| Signal Tower / Colors | — | Installed, 3 colors[2] |
| Furnace Temperature Controller | — | 560 A[2] |
| Furnace Overtemp Detector | — | Fenwal / MDMR-5FR[2] |
| Gas Detector | — | GD-K 7 D 4[2] |
| Detecting Gas | — | Hcl, N2O[2] |
| User Host Computer I/F | — | SECS[2] |
| Process Gas | — | N2, O2, H2, N2O[2] |
| Basic Style | — | Integrated Gas System (Fujikin)[2] |
| Process | — | Hi Temp Oxide[3] |
| OEM | — | Tel[2] |
| Model | — | Alpha 8 SE D[2] |
| Equipment type | — | Furnace[2] |
| Wafer size | — | 6 inch[2] |
| Vintage | — | 2006[2] |
| Manual Valve | — | Nupro[2] |
| Air Operated Valve | — | Fujikin[2] |
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