Waferpedia

Comparison ledger

321versusDW 288 Wire Cutting

Disco 321, Meyer Burger DW 288 Wire Cutting, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
OEMDiscoMeyer Burger
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321—
Cited variants—
Specifications
OEMDisco[3]—
Model321[3]—
Equipment typeWafer Dicing Saw[3]—
Facility contextCleanroom Instrumentation[3]—
Application areaNano and Micro Fabrication[3]—
LocationFNT 4.106[3]—
Wafer SizeUp to 6 inches[4]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[5]—
Spindle Power (alternate)1500 Watt spindle[4]—
Non-Contact SetupNon Contact Setup[5]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[5]—
Broken Blade DetectionBroken Blade Detection[5]—
Light TowerIncludes Light Tower[5]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[4]—
Wafer size capabilityUp to 6" wafers[5]—
Chuck6-inch porous film frame chuck[4]—
Spindle power1500-watt spindle[4]—
FootprintSmall footprint[4]—
SetupNon-contact setup[5]—
Blade break detectionBroken blade detection[5]—
Other featuresFloppy drive, light tower, blade tools, manuals[5]—
Web length—420 mm[2]
Wire speed—25 m/s (1500 m/min)[2]
Wire acceleration—8 m/s² (< 4 s)[2]
Min. wire diameter—100 μm[2]
Max. wire tension—45 N[2]
Rocking principle—Rocking of work piece[2]
Rocking angle—±12°[2]
Wire guide roller axis distance—540 mm[2]
Cutting fluid tank—240 l[2]
Machine dimensions (L × W × H)—3620 × 1780 × 3010 mm[2]
Machine weight—10500 kg[2]
Max. work piece size—Ø 8″ × 420 mm or □ 210 × 420 mm[2]
Max. work piece dimensions (round)—Ø 206 × 420 mm[2]
Max. work piece dimensions (square)—210 × 420 mm[2]
Cutting fluid tank capacity—240 l[2]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]precision-surface.comprecision-surface.com
  3. [3]tmi.utexas.edutmi.utexas.edu
  4. [4]jmind.comjmind.com
  5. [5]gtsaz.comgtsaz.com