Waferpedia

Comparison ledger

dad3240-dicing-sawversus850 LT SOI Fusion Wafer

Disco dad3240-dicing-saw, EV Group 850 LT SOI Fusion Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMDiscoEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size200mm200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco dad3240-dicing-sawEV Group 850
Specifications
vendorDisco[1]—
modelDFL7340[1]—
process areaPackaging[1]—
compatible materialsSi wafers only[1]—
engineSDE03 engine with λ = 1342 nm[1]—
maximum sample diameter200 mm[1]—
dicing orientationTopside or backside (through tape) dicing possible[1]—
Configuration—Fully-Automatic[2]
Wafer size—Suitable for wafer sizes up to 8"/200mm wafers[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  2. [2]inventory listing