Waferpedia

Comparison ledger

DFS 8910 Surface Planarizationversus120 Continuous

Disco DFS 8910 Surface Planarization, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMDiscoLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFS 8910 Surface PlanarizationLapmaster 120 Continuous

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