Waferpedia

Comparison ledger

1034versusRS 75 TCA

Electroglas 1034, KLA RS 75 TCA, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1034Electroglas
OEMElectroglasKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas 1034KLA RS 75
Specifications
Voltage—115 V[1]
Configuration—1.8K Watts[2]
Model—RS 75 TCA[2]
Make—KLA[2]
Power—115 V, 1.8K Watts, 50/60 Hz[2]
Frequency—50/60 Hz[1]
Wafer size—6 inch, 8 inch[1]
Wafer handling—3 H type loader[1]
Type—Four Point Probe (4PP)[4]
Vintage—1999-3[4]
Tool type—Four-point probe (4PP)[4]
Manufacturer—KLA[1]
Category—Test & Probe[1]
Equipment type—Resistivity system[1]
Probe head / loading—3 H type loader[1]
Wafer handler—100 mm to 200 mm dual-cassette wafer handler[4]
Flat finder—Included[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]jenesisequipment.comjenesisequipment.com