Waferpedia

Comparison ledger

1034versusVLR

Electroglas 1034, Plasma-Therm VLR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1034Electroglas
VLRPlasma-Therm
OEMElectroglasPlasma-Therm
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas 1034Plasma-Therm VLR
Specifications
Configuration—With PECVD Module System & disconnected box[1]
Make—Plasmatherm[1]
Model—VLR[1]
Asset description—Plasmatherm VLR Handler - With PECVD Module System & disconnected box[1]
Related process-control reference—Unaxis VLR Dep / Unaxis VLR Etch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu