Comparison ledger
EV Group 101, EV Group EVG 40 NT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | EVG 40 NTEV Group |
|---|---|---|
| OEM | EV Group | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | — |
| Specifications | ||
| OEM | EV Group[1] | — |
| Model | 101[1] | EVG 40 NT[4] |
| Equipment name | EVG 101 Spray Coater[1] | — |
| NEMO ID | evgspraycoat[1] | — |
| Training required | EVG 101 Training[1] | — |
| Training duration | 1.50 hours[1] | — |
| Processing technique | Resist Spray Coat (manual)[1] | — |
| Cleanliness | "All"[1] | — |
| Location | SNF Paul G Allen L107 Cleanroom[1] | — |
| Wafer diameter (substrate size) | up to 300 mm[2] | — |
| Available modules | Spin coat / OmniSpray® / develop[2] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[2] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[2] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[3] | — |
| Cleanliness group (at SNF) | "All"[1] | — |
| Manufacturer | — | EV Group[4] |
| Product type | — | Aligner[4] |
| Vintage | — | 2011[4] |
| Measurement scope | — | Lithography-relevant parameters and bond alignment accuracy[5] |
| Measurement methods | — | Critical dimension measurement, die-to-die alignment verification, multi-layer thickness measurement[5] |
| Tool format | — | Stand-alone tool[5] |
| Integrated module | — | AVM (HVM-integrated module)[5] |
| Application examples | — | Nanoimprint lithography and wafer-to-wafer bonding[5] |
| Verification capability | — | 100 nm bond overlay accuracy of EVG's GEMINI FB automated fusion bonding system[5] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →