Comparison ledger
EV Group 101, SUSS MicroTec MA1006, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | MA1006SUSS MicroTec |
|---|---|---|
| OEM | EV Group | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | SUSS MicroTec MA1006 |
| Cited variants | — | |
| Specifications | ||
| OEM | EV Group[3] | SUSS MicroTec[6] |
| Model | 101[3] | MA1006[6] |
| Equipment name | EVG 101 Spray Coater[3] | — |
| NEMO ID | evgspraycoat[3] | — |
| Training required | EVG 101 Training[3] | — |
| Training duration | 1.50 hours[3] | — |
| Processing technique | Resist Spray Coat (manual)[3] | — |
| Cleanliness | "All"[3] | — |
| Location | SNF Paul G Allen L107 Cleanroom[3] | — |
| Wafer diameter (substrate size) | up to 300 mm[4] | — |
| Available modules | Spin coat / OmniSpray® / develop[4] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[4] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[4] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[5] | — |
| Cleanliness group (at SNF) | "All"[3] | — |
| Tool category on source page | — | Step Height PROFILOMETER[6] |
| Resolution | — | 1 micron on 6-inch wafers[7] |
| Measured linewidth | — | 2 µm at full photoresist height (Shipley 1813 process)[8] |
| Wafer size | — | up to 150mm diameter[2] |
| Mask size | — | maximum 7" x 7"[2] |
| Exposure modes | — | Proximity, soft, hard, vacuum contact[2] |
| Exposure optics | — | UV400: 350-450nm; UV300: 280-350nm; Hg-lamp 350W or 1000W[2] |
| Exposure uniformity | — | ±5% typical for 150mm wafer[2] |
| Alignment step | — | 1μm steps[2] |
| Soft contact pressure | — | 2-8 N[2] |
| Hard contact pressure | — | Nitrogen pressure 0-2 bar[2] |
| Vacuum contact level | — | < -0.8 bar[2] |
| Dimensions (W×H×D) | — | ca. 920mm × 1600mm × 870mm[2] |
| Weight | — | ca. 450 kg[2] |
| Power requirement | — | 350W lamp: 1200 VA; 1000W lamp: 2000 VA[2] |
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