Waferpedia

Comparison ledger

6200 Infinity Maskversus1000 Family

EV Group 6200 Infinity Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMEV GroupUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEV Group 6200 Infinity MaskUltratech 1000 Family
Specifications
ManufacturerEV Group[1]—
Model6200 Infinity Mask[1]—
CategoryLithography[1]—
Tool typeMask aligner[2]Photolithography step-and-repeat 1X stepper[4]
Inventory designationEVG 6200 Infinity Mask Aligner[3]—
Vintage2011[2]—
Model designationEVG 6200 Infinity[2]—
Optical design—Wynne Dyson[4]
Magnification—1X[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]en.wikipedia.orgen.wikipedia.org