Comparison ledger
Hitachi 1305 BSG 3, Lam Research Gasonics L 3500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | Gasonics L 3500Lam Research |
|---|---|---|
| OEM | Hitachi | Lam Research |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Lam Research Gasonics L 3500 |
| Specifications | ||
| Process type | — | Plasma Asher[1] |
| Wafer size | — | 12 inch[2] |
| Process gases | — | O2 and N2[1] |
| Robot upgrade | — | HINE Hatm 5.0 atmospheric robot arm[3] |
| Weight | — | 200 kg[3] |
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