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1305 BSG 3versusSS 3100

Hitachi 1305 BSG 3, SCREEN SS 3100, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
SS 3100SCREEN
OEMHitachiSCREEN
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3SCREEN SS 3100
Specifications
Manufacturer—SCREEN / DNS[1]
Model—SS 3100[1]
Equipment type—Scrubber[1]
Equipment category—Wet Processing / Clean[2]
Example unit vintage—2009[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing