Comparison ledger
Hitachi SU 8030 FEG-SEM, Zeiss Merlin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 8030 FEG-SEMHitachi | MerlinZeiss |
|---|---|---|
| OEM | Hitachi | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 4" | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU | Zeiss Merlin |
| Specifications | ||
| Configuration | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[1] | — |
| Wafer size | 4" Wafer Holder for SU8030/SU8040[1] | — |
| Stage | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[1] | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[2] |
| Detector System | Triple Electron Detector System w/ Super ExB[1] | — |
| Specimen Airlock | 6" Specimen Exchange Airlock[1] | — |
| Beam Deceleration | Beam Deceleration System[1] | — |
| Vacuum System | TMP Dry Vacuum System[1] | — |
| EDS Integration | EDS Ready with DBC (P/N536-9805) and RS-232 Interface (P/N536-9807)[1] | — |
| Operating System | Windows XP[1] | — |
| Safety Compliance | UL and S2-02 Safety Compliance[1] | — |
| Instrument type | — | Scanning electron microscope (SEM)[2] |
| Column | — | GEMINI II[2] |
| Loadlock | — | Semi-automatic airlock[2] |
| Control software | — | ZeissSmartSEM[2] |
| Available holders | — | mono samples, cleaved samples, and full 4 inch wafer[2] |
| Detectors | — | In-Lens, HE-SE2, EsB, and EDX detector[2] |
| Holders | — | Mono samples, cleaved samples, and full 4 inch wafer[2] |
| Detector | — | In-Lens detector[2] |
| Software for offline analysis and metrology | — | ProSEM software[2] |
| Electron optical column | — | GEMINI II[2] |
| Sample holders | — | mono samples, cleaved samples, full 4 inch wafer[2] |
| Detector types | — | In-Lens, HE-SE2, EsB, EDX[2] |
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