Comparison ledger
JEOL DA-1, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DA-1JEOL | |
|---|---|---|
| OEM | JEOL | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | Electron microscope | — |
| Introduced | 1947 | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | JEOL DA-1 | KLA .204 PSL Wafer |
| Specifications | ||
| Type | prototype magnetic field–type electron microscope[1] | — |
| Developer context | developed by an initial group that included Kenji Kazato and Kazuo Ito in Mobara, Chiba Prefecture, Japan[1] | — |
| Development status | prototype[1] | — |
| Instrument type | magnetic field–type electron microscope[1] | — |
| First commercialized | 1947[1] | — |
| Historical note | described as the origin of developing the electron microscope by JEOL Ltd.[2] | — |
| Historical recognition | registered in 2010 as an Important Historical Scientific and Technical Material (Future Technology Heritage)[3] | — |
| Configuration | — | NIST Traceable[4] |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[4] |
| NIST Traceable | — | Yes[4] |
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