Waferpedia

Comparison ledger

3 NS 411 B F 003 Atmospheric Wafer Robotversus120 Continuous

Kawasaki 3 NS 411 B F 003 Atmospheric Wafer Robot, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
3 NS 411 B F 003 Atmospheric Wafer RobotKawasaki
120 ContinuousLapmaster
OEMKawasakiLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKawasaki 3 NS 411 B F 003 Atmospheric Wafer RobotLapmaster 120 Continuous
Specifications
ConfigurationAMAT 12" CMP[1]—
Equipment TypeAtmospheric Wafer Robot[1]—
Wafer Size12 inch[1]—
CategoryCMP[2]—
ManufacturerKawasaki[1]—
Model3 NS 411 B F 003[1]—
3 NS 411 B F 003 Atmospheric Wafer Robot entry120 Continuous entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com