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Comparison ledger

0035235-003 MMD Headversus6420

KLA 0035235-003 MMD Head, KLA 6420, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6420KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2023 decommissioned
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA 6420
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]new laser[2]
Model0035235-003[1]6420[2]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Manufacturer—KLA[3]
Tool type—Inspection System[2]
Category—Metrology & Inspection[3]
Wafer sizes—8 inch[2]
Vintage—1997 Vintage[2]
Status note—software boots; measurement and board functionality noted; laser inoperative[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com