Comparison ledger
KLA 1.112 PSL Wafer, KLA Surfscan SP 1 Classic Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Surfscan |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | 4 stations[4] |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Manufacturer | — | KLA[4] |
| Model | — | Surfscan SP 1 Classic[4] |
| Wafer sizes | — | 6, 8 inch[4] |
| Tool type | — | particle defect inspection system[5] |
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