Comparison ledger
KLA 1.112 PSL Wafer, Olympus MX 61 L F 300 MM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MX 61 L F 300 MMOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Olympus MX 61 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 14x12 stage[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Option | — | Lumenera Infinity 2-3C, 3.3 megapixel Digital CCD Camera with PC and software[3] |
| Type | — | Inspection microscope[3] |
| Inspection modes | — | Brightfield and darkfield inspection[3] |
| Stage | — | 14x12 stage[3] |
| Observation tube | — | Titling trinocular observation tube[3] |
| XY stage | — | Clutch driven manual XY stage with coaxial controls (Olympus MX-SIC 1412 RS)[3] |
| Light control | — | Front mounted controls for light intensity[3] |
| Cube slider | — | 3 position cube slider for BF/DF/optional DIC[3] |
| Interface | — | RS 232 C interface for PC data export[3] |
| DIC slider | — | Olympus U-DICR DIC Nomarski slider[3] |
| Eyepieces | — | Super widefield SWH 10 x-H/ 26.5 eyepieces[3] |
| Objectives | — | Olympus objective 5X, 10X, 20X, 50X and 100X[3] |
| Nosepiece | — | Motorized nosepiece rotation[3] |
| Analyzer | — | Olympus U-AN360-3 rotating analyzer[3] |
| Filters | — | Olympus U-25ND25 BX2 neutral density filter in slider 25%, Olympus U-25LBD daylight blue filter slider, and Olympus U-PO3 polarizer slider[3] |
| Illuminator | — | Olympus U-LH100-3 12V100W illuminator[3] |
| Additional illuminator | — | Schott YAHATA Megalight 100 illuminator with Olympus LG-SF tube[3] |
| Camera option | — | Lumenera Infinity 2-3C, 3.3 megapixel digital CCD camera with PC and software[3] |
| Camera | — | Lumenera Infinity 1 digital CCD camera with PC and software[3] |
| Refurbishment | — | Full tested and refurbished by Olympus authorized technician[3] |
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