Comparison ledger
KLA 1.112 PSL Wafer, Onto Innovation NSX 115, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 115Onto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Onto Innovation NSX 115 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Damaged or Shortage:[4] |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Manufacturer | — | Onto Innovation[5] |
| Category | — | Metrology & Inspection[5] |
| Model | — | NSX 115[4] |
| Type | — | inspection system[5] |
| Power | — | 200-240 VAC, 50/60 Hz[1] |
| Full Load | — | 6 A[1] |
| Largest Load | — | 1.5 A[1] |
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