Comparison ledger
KLA 1.112 PSL Wafer, Zeiss UEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UEMZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zeiss UEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Brightfield[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Illumination Type | — | Reflected Light[3] |
| Binocular Angle | — | 45°[3] |
| Magnification | — | 8X[3] |
| Magnification Changer | — | 1.25X, 1.6X, 2X[3] |
| Illumination Power | — | 12 V, 60 watts[3] |
| Power Supply included | — | YES[3] |
| Stage Type | — | Coaxial X-Y[3] |
| Length | — | 273 mm (10.78 in)[3] |
| Width | — | 356 mm (14.016 in)[3] |
| Manufacturer | — | Zeiss[3] |
| Model | — | UEM[3] |
| Category | — | Metrology & Inspection[4] |
| Description | — | Brightfield microscope[3] |
| Eyepiece | — | KPL Eye Piece[3] |
| Stage Area Length | — | 273 mm (10.78 in)[3] |
| Stage Area Width | — | 356 mm (14.016 in)[3] |
| X Stage Travel | — | 152 mm (5.984 in)[3] |
| Y Stage Travel | — | 152 mm (5.984 in)[3] |
| Objective Models | — | Epiplan 4X 0.1; Epiplan 8X 0.2; Epiplan 16X 0.35; Epiplan 40X 0.85; Epiplan 80X 0.95[3] |
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