Comparison ledger
KLA 2138 Brightfield, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA .498 PSL Wafer |
| Specifications | ||
| Configuration | 30 A[1] | NIST Traceable[3] |
| Voltage | 208 V, 3 Phase[1] | — |
| Software Version | 5.4.010[1] | — |
| Robot Type | KLA Internal[1] | — |
| Wafer Size | 8 inch[1] | — |
| Wafer Size (Version) | 200 mm[2] | — |
| Current | 30 A[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Vintage | 1997[1] | — |
| NIST traceability | — | Yes[3] |
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