Waferpedia

Comparison ledger

.496 PSL WaferversusDM2700

KLA .496 PSL Wafer, Leica DM2700, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
DM2700Leica
OEMKLALeica
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferLeica DM2700
Cited variants—
  • DM2700 M RL[1]
  • DM2700 M RL/TL[1]
Specifications
ConfigurationNIST Traceable[2]—
Wafer size8 inch[2]—
TraceabilityNIST Traceable[2]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[2]—
CategoryMetrology & Inspection[3]—
Model—DM2700[4]
OEM—Leica[4]
Equipment type—Upright Materials Microscope / Optical Microscope[4]
Location—SEEL 181E[4]
Operating modes—Transmission and reflecting modes[4]
Illumination—White light LED illumination[4]
Imaging modes—Bright field and dark field observation[4]
Rate table entry—Optical Microscope Leica DM2700 Upright[5]
Illumination Type—Universal white light LED[6]
LED Color Temperature—4500 K[6]
Contrast Methods (Incident Light)—Brightfield, Darkfield, Polarization, Differential Interference Contrast (DIC), Fluorescence, Oblique Illumination[1]
Contrast Methods (Transmitted Light)—Brightfield, Darkfield, Phase Contrast, Polarization, Differential Interference Contrast (ICT)[1]
Objective Turret—Manual; 6x or 7x for objectives with M25 thread; 5x for objectives with M32 thread[1]
Magnification Changer—Manual; steps: 1x, 1.5x, 2x[1]
Maximum Sample Size—100 × 100 mm (foils, wafers, PCBs); thickness up to 80 mm[6]
Ambient Temperature Range—15–35 °C[1]
Relative Humidity (non-condensing)—Max. 80% up to 30 °C[1]
Supply Voltage—100 – 240 VAC[7]
Weight (fully equipped)—More than 18 kg[1]
Microscope Type—Upright materials microscope[4]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]colorado.educolorado.edu
  5. [5]colorado.educolorado.edu
  6. [6]leica-microsystems.comleica-microsystems.com
  7. [7]manualslib.commanualslib.com