Comparison ledger
KLA .496 PSL Wafer, Olympus scope2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | scope2Olympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Olympus scope2 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Vendor | — | Olympus[3] |
| Model | — | MX-61[3] |
| Purpose | — | Semiconductor microscope for sample inspection and documentation[3] |
| Observation methods | — | Brightfield and darkfield[3] |
| Objectives | — | 5x, 10x, 20x, 50x, and 100x objectives on motorized turret[3] |
| Stage focus | — | Manual stage focus[3] |
| Digital imaging software | — | Steam Motion software for calibrated measurements[3] |
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