Waferpedia

Comparison ledger

.498 PSL WaferversusScientific FEI Strata 400 S FE-SEM

KLA .498 PSL Wafer, Thermo Fisher Scientific FEI Strata 400 S FE-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferThermo Fisher Scientific FEI Strata 400 S
Specifications
ConfigurationNIST Traceable[1]FIB IGP not under vacuum[2]
NIST traceabilityYes[1]—
Instrument type—Field Emission Scanning Electron Microscope[2]
Category—Metrology & Inspection[3]
Vintage—2007[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com