Comparison ledger
KLA 6200, KLA 7600 Patterned Wafer Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6200KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 25 Wafer Slot Cassette | 25 Wafer Slot Cassette |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 6200 | KLA 7600 Patterned Wafer Particle Defect |
| Specifications | ||
| Wafer size | 25 Wafer Slot Cassette[1] | 25 Wafer Slot Cassette[3] |
| Configuration | Scan Stage[1] | Cassette Transfer[4] |
| Process | Vac 23 InHg[1] | — |
| Inlet Power | 1 line of 208 Vac, 15 amp[1] | 1 line of 208 Vac 15 Amp[3] |
| Voltage | 208 V[2] | — |
| Frequency | 60 Hz[2] | — |
| Cassette capacity | 25 wafer slots[1] | — |
| Process vacuum | 23 InHg[1] | — |
| Exhaust | Blower for laser cooling[1] | Exhaust with Blower for laser cooling[3] |
| Power requirement | 208 Vac, 15 amp[1] | — |
| Process Vac | — | 23 InHg[4] |
| Manufacturer | — | KLA[3] |
| Category | — | Metrology & Inspection[3] |
| Cassette transfer | — | Included[3] |
| Scan stage | — | Included[3] |
| Wafer transfer | — | Included[3] |
| Boat elevator / robot transfer | — | Included[3] |
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